The Global GaN Wafer Inspection and Review System Market was valued at USD 234 million in 2023 and is projected to reach USD 939.41 million by 2032, growing at a Compound Annual Growth Rate (CAGR) of 16.70% during the forecast period (2024-2032). This growth is driven by increasing demand for high-performance GaN-based semiconductors in power electronics, RF devices, and LED applications.
As the semiconductor industry transitions toward wider bandgap materials, GaN wafer inspection systems have become critical for ensuring defect-free manufacturing at scale. In this blog, we profile the Top 10 Companies in the GaN Wafer Inspection Industry—pioneers in metrology, defect detection, and AI-driven quality control solutions.
🔟 1. KLA Corporation
Headquarters: Milpitas, California, USA
Key Offering: Surfscan SP A2/A3 Unpatterned Wafer Defect Inspection Systems
KLA dominates the semiconductor inspection market with its cutting-edge metrology solutions for GaN wafers. Their systems enable nanometer-scale defect detection across 150-200mm GaN substrates, crucial for power semiconductor fabrication.
Technology Leadership:
- Patented broadband plasma inspection technology
- AI-powered defect classification algorithms
- Integrated solutions for GaN epitaxial growth monitoring
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GaN Wafer Inspection and Review System Market – View in Detailed Research Report
9️⃣ 2. Lasertec Corporation
Headquarters: Yokohama, Japan
Key Offering: M7360 Series GaN Patterned Wafer Inspection Systems
Lasertec specializes in high-sensitivity inspection tools for GaN power electronics manufacturing. Their photoluminescence-based systems detect sub-surface defects in GaN-on-SiC and GaN-on-Si wafers with industry-leading throughput.
Technology Leadership:
- World’s first mass-production GaN defect inspection system
- Proprietary multi-wavelength detection technology
8️⃣ 3. Nanotronics
Headquarters: Brooklyn, New York, USA
Key Offering: nSPEC® 3D AI Inspection Systems for GaN
Nanotronics has disrupted the market with its AI-driven optical inspection platforms that combine microscopy, spectroscopy, and machine learning for GaN wafer quality control.
Technology Leadership:
- Real-time adaptive defect classification
- 10x faster inspection than conventional tools
7️⃣ 4. Toray Engineering (TASMIT)
Headquarters: Tokyo, Japan
Key Offering: TSV-1000 Series GaN Inspection Systems
Toray’s TASMIT division provides advanced patterned wafer inspection solutions tailored for GaN power device manufacturing, with particular strength in automotive-grade semiconductor production.
Technology Leadership:
- High-accuracy dislocation density measurement
- Seamless integration with MOCVD systems
Download FREE Sample Report:
GaN Wafer Inspection and Review System Market – View in Detailed Research Report
6️⃣ 5. Bruker Corporation
Headquarters: Billerica, Massachusetts, USA
Key Offering: ContourGT Optical Profilers for GaN Wafer Metrology
Bruker provides 3D surface measurement systems that characterize GaN wafer roughness, bow, and thickness variation with atomic-level precision.
Technology Leadership:
- Sub-nanometer vertical resolution
- Automated edge exclusion analysis
5️⃣ 6. LAZIN CO., LTD
Headquarters: Incheon, South Korea
Key Offering: LI-A1000 GaN Wafer Inspection Systems
LAZIN specializes in laser-based inspection systems for GaN epitaxial wafers, with particular expertise in substrate defect detection prior to device fabrication.
Technology Leadership:
- Non-contact thickness mapping technology
- High-speed full wafer scanning (≤5min/wafer)
4️⃣ 7. EtaMax Inc.
Headquarters: Beijing, China
Key Offering: EMX-300 GaN Wafer Metrology Systems
EtaMax provides cost-effective inspection solutions for China’s growing GaN semiconductor industry, serving both LED and power device manufacturers.
Technology Leadership:
- Dual-mode (optical + electrical) defect detection
- Automated wafer handling for 24/7 operation
3️⃣ 8. Screen Holdings
Headquarters: Kyoto, Japan
Key Offering: LS-9000 Series GaN Wafer Inspection Tools
Screen combines laser scattering and optical microscopy technologies to deliver comprehensive GaN wafer inspection solutions for high-volume manufacturing.
Technology Leadership:
- Cluster tool architecture for fab integration
- Multi-wafer parallel processing capability
2️⃣ 9. Tokyo Electron (TEL)
Headquarters: Tokyo, Japan
Key Offering: Ultima® GaN Wafer Inspection Systems
TEL’s inspection division provides semiconductor manufacturing solutions that integrate directly with their GaN deposition and etch process equipment.
Technology Leadership:
- In-situ process monitoring capabilities
- Advanced particle counting algorithms
1️⃣ 10. confovis GmbH
Headquarters: Jena, Germany
Key Offering: Confocal Wafer Inspection Systems for GaN
confovis develops high-resolution confocal microscopy systems specifically optimized for GaN wafer defect detection and 3D feature measurement.
Technology Leadership:
- Sub-micron defect detection capability
- Advanced wafer mapping software
Read Full Report:
GaN Wafer Inspection and Review System Market – View in Detailed Research Report
🔬 Outlook: The Future of GaN Wafer Inspection Is Smarter and More Automated
The GaN wafer inspection market is undergoing rapid transformation as semiconductor manufacturers demand higher yields, faster throughput, and smarter defect analysis capabilities.
📈 Key Trends Shaping the Market:
- AI-powered defect classification reducing false positives by 30-50%
- 300mm wafer inspection capability development for GaN
- Integration with Industry 4.0 smart factory systems
- Multi-modal inspection combining optical, electrical, and X-ray techniques
Read Full Report:
GaN Wafer Inspection and Review System Market – View in Detailed Research Report
The companies listed above are not just providing inspection tools—they’re enabling the next generation of GaN semiconductor innovation.